2/10/2011	9:02:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2011	9:02:28 AM	Recipe started at 9:02 AM
2/10/2011	9:02:28 AM	Helium valve closed
2/10/2011	9:02:28 AM	H2 valve closed
2/10/2011	9:02:28 AM	BCl3 valve closed
2/10/2011	9:02:28 AM	PH3 valve closed
2/10/2011	9:02:28 AM	SiCl4 pre valve closed
2/10/2011	9:02:28 AM	SiCl4 post valve closed
2/10/2011	9:02:28 AM	Main Vac valve closed
2/10/2011	9:02:28 AM	Bubbler valve closed
2/10/2011	9:02:28 AM	Bypass valve opened
2/10/2011	9:02:28 AM	Helium MFC set to  0.000000
2/10/2011	9:02:28 AM	H2 MFC set to  0.000000
2/10/2011	9:02:28 AM	BCl3 MFC set to  0.000000
2/10/2011	9:02:28 AM	PHl3 MFC set to  0.000000
2/10/2011	9:02:28 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:02:28 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:02:28 AM	Tube furnace set to 0
2/10/2011	9:02:28 AM	Helium valve closed
2/10/2011	9:02:28 AM	H2 valve closed
2/10/2011	9:02:28 AM	BCl3 valve closed
2/10/2011	9:02:28 AM	PH3 valve closed
2/10/2011	9:02:28 AM	SiCl4 pre valve closed
2/10/2011	9:02:28 AM	SiCl4 post valve closed
2/10/2011	9:02:28 AM	Bubbler valve closed
2/10/2011	9:02:28 AM	Main Vac valve opened
2/10/2011	9:02:28 AM	Bypass valve opened
2/10/2011	9:02:28 AM	Helium MFC set to  0.000000
2/10/2011	9:02:28 AM	H2 MFC set to  0.000000
2/10/2011	9:02:28 AM	BCl3 MFC set to  0.000000
2/10/2011	9:02:28 AM	PHl3 MFC set to  0.000000
2/10/2011	9:02:28 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:02:28 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:02:28 AM	Tube furnace set to 0
2/10/2011	9:02:28 AM	Run finished at 9:02 AM
2/10/2011	9:02:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2011	9:16:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/10/2011	9:16:58 AM	Recipe started at 9:16 AM
2/10/2011	9:16:58 AM	Helium valve closed
2/10/2011	9:16:58 AM	H2 valve closed
2/10/2011	9:16:58 AM	BCl3 valve closed
2/10/2011	9:16:58 AM	PH3 valve closed
2/10/2011	9:16:58 AM	SiCl4 pre valve closed
2/10/2011	9:16:58 AM	SiCl4 post valve closed
2/10/2011	9:16:58 AM	Main Vac valve closed
2/10/2011	9:16:58 AM	Bubbler valve closed
2/10/2011	9:16:58 AM	Bypass valve opened
2/10/2011	9:16:58 AM	Helium MFC set to  0.000000
2/10/2011	9:16:58 AM	H2 MFC set to  0.000000
2/10/2011	9:16:58 AM	BCl3 MFC set to  0.000000
2/10/2011	9:16:58 AM	PHl3 MFC set to  0.000000
2/10/2011	9:16:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:16:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:16:59 AM	Tube furnace set to 0
2/10/2011	9:16:59 AM	Helium valve closed
2/10/2011	9:16:59 AM	H2 valve closed
2/10/2011	9:16:59 AM	BCl3 valve closed
2/10/2011	9:16:59 AM	PH3 valve closed
2/10/2011	9:16:59 AM	SiCl4 pre valve closed
2/10/2011	9:16:59 AM	SiCl4 post valve closed
2/10/2011	9:16:59 AM	Bubbler valve closed
2/10/2011	9:16:59 AM	Main Vac valve opened
2/10/2011	9:16:59 AM	Bypass valve opened
2/10/2011	9:16:59 AM	Helium MFC set to  0.000000
2/10/2011	9:16:59 AM	H2 MFC set to  0.000000
2/10/2011	9:16:59 AM	BCl3 MFC set to  0.000000
2/10/2011	9:16:59 AM	PHl3 MFC set to  0.000000
2/10/2011	9:16:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:16:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:16:59 AM	Tube furnace set to 0
2/10/2011	9:17:59 AM	H2 valve closed
2/10/2011	9:17:59 AM	BCl3 valve closed
2/10/2011	9:17:59 AM	PH3 valve closed
2/10/2011	9:17:59 AM	SiCl4 pre valve closed
2/10/2011	9:17:59 AM	SiCl4 post valve closed
2/10/2011	9:17:59 AM	Bubbler valve closed
2/10/2011	9:17:59 AM	Helium valve opened
2/10/2011	9:17:59 AM	Main Vac valve opened
2/10/2011	9:17:59 AM	Bypass valve opened
2/10/2011	9:17:59 AM	Helium MFC set to  100.000000
2/10/2011	9:17:59 AM	H2 MFC set to  0.000000
2/10/2011	9:17:59 AM	BCl3 MFC set to  0.000000
2/10/2011	9:17:59 AM	PHl3 MFC set to  0.000000
2/10/2011	9:17:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:17:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:17:59 AM	Tube furnace set to 0
2/10/2011	9:18:59 AM	Helium valve closed
2/10/2011	9:18:59 AM	H2 valve closed
2/10/2011	9:18:59 AM	BCl3 valve closed
2/10/2011	9:18:59 AM	PH3 valve closed
2/10/2011	9:18:59 AM	SiCl4 pre valve closed
2/10/2011	9:18:59 AM	SiCl4 post valve closed
2/10/2011	9:18:59 AM	Bubbler valve closed
2/10/2011	9:18:59 AM	Main Vac valve opened
2/10/2011	9:18:59 AM	Bypass valve opened
2/10/2011	9:18:59 AM	Helium MFC set to  0.000000
2/10/2011	9:18:59 AM	H2 MFC set to  0.000000
2/10/2011	9:18:59 AM	BCl3 MFC set to  0.000000
2/10/2011	9:18:59 AM	PHl3 MFC set to  0.000000
2/10/2011	9:18:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:18:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:18:59 AM	Tube furnace set to 0
2/10/2011	9:19:59 AM	H2 valve closed
2/10/2011	9:19:59 AM	BCl3 valve closed
2/10/2011	9:19:59 AM	PH3 valve closed
2/10/2011	9:19:59 AM	SiCl4 pre valve closed
2/10/2011	9:19:59 AM	SiCl4 post valve closed
2/10/2011	9:19:59 AM	Bubbler valve closed
2/10/2011	9:19:59 AM	Helium valve opened
2/10/2011	9:19:59 AM	Main Vac valve opened
2/10/2011	9:19:59 AM	Bypass valve opened
2/10/2011	9:19:59 AM	Helium MFC set to  100.000000
2/10/2011	9:19:59 AM	H2 MFC set to  0.000000
2/10/2011	9:20:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:20:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:20:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:20:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:20:00 AM	Tube furnace set to 0
2/10/2011	9:21:00 AM	Helium valve closed
2/10/2011	9:21:00 AM	H2 valve closed
2/10/2011	9:21:00 AM	BCl3 valve closed
2/10/2011	9:21:00 AM	PH3 valve closed
2/10/2011	9:21:00 AM	SiCl4 pre valve closed
2/10/2011	9:21:00 AM	SiCl4 post valve closed
2/10/2011	9:21:00 AM	Bubbler valve closed
2/10/2011	9:21:00 AM	Main Vac valve opened
2/10/2011	9:21:00 AM	Bypass valve opened
2/10/2011	9:21:00 AM	Helium MFC set to  0.000000
2/10/2011	9:21:00 AM	H2 MFC set to  0.000000
2/10/2011	9:21:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:21:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:21:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:21:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:21:00 AM	Tube furnace set to 0
2/10/2011	9:22:00 AM	H2 valve closed
2/10/2011	9:22:00 AM	BCl3 valve closed
2/10/2011	9:22:00 AM	PH3 valve closed
2/10/2011	9:22:00 AM	SiCl4 pre valve closed
2/10/2011	9:22:00 AM	SiCl4 post valve closed
2/10/2011	9:22:00 AM	Bubbler valve closed
2/10/2011	9:22:00 AM	Helium valve opened
2/10/2011	9:22:00 AM	Main Vac valve opened
2/10/2011	9:22:00 AM	Bypass valve opened
2/10/2011	9:22:00 AM	Helium MFC set to  100.000000
2/10/2011	9:22:00 AM	H2 MFC set to  0.000000
2/10/2011	9:22:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:22:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:22:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:22:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:22:00 AM	Tube furnace set to 0
2/10/2011	9:23:00 AM	Helium valve closed
2/10/2011	9:23:00 AM	H2 valve closed
2/10/2011	9:23:00 AM	BCl3 valve closed
2/10/2011	9:23:00 AM	PH3 valve closed
2/10/2011	9:23:00 AM	SiCl4 pre valve closed
2/10/2011	9:23:00 AM	SiCl4 post valve closed
2/10/2011	9:23:00 AM	Bubbler valve closed
2/10/2011	9:23:00 AM	Main Vac valve opened
2/10/2011	9:23:00 AM	Bypass valve opened
2/10/2011	9:23:00 AM	Helium MFC set to  0.000000
2/10/2011	9:23:00 AM	H2 MFC set to  0.000000
2/10/2011	9:23:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:23:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:23:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:23:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:23:00 AM	Tube furnace set to 0
2/10/2011	9:24:00 AM	H2 valve closed
2/10/2011	9:24:00 AM	BCl3 valve closed
2/10/2011	9:24:00 AM	PH3 valve closed
2/10/2011	9:24:00 AM	SiCl4 pre valve closed
2/10/2011	9:24:00 AM	SiCl4 post valve closed
2/10/2011	9:24:00 AM	Bubbler valve closed
2/10/2011	9:24:00 AM	Helium valve opened
2/10/2011	9:24:00 AM	Main Vac valve opened
2/10/2011	9:24:00 AM	Bypass valve opened
2/10/2011	9:24:00 AM	Helium MFC set to  100.000000
2/10/2011	9:24:00 AM	H2 MFC set to  0.000000
2/10/2011	9:24:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:24:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:24:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:24:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:24:00 AM	Tube furnace set to 0
2/10/2011	9:25:00 AM	Helium valve closed
2/10/2011	9:25:00 AM	H2 valve closed
2/10/2011	9:25:00 AM	BCl3 valve closed
2/10/2011	9:25:00 AM	PH3 valve closed
2/10/2011	9:25:00 AM	SiCl4 pre valve closed
2/10/2011	9:25:00 AM	SiCl4 post valve closed
2/10/2011	9:25:00 AM	Bubbler valve closed
2/10/2011	9:25:00 AM	Main Vac valve opened
2/10/2011	9:25:00 AM	Bypass valve opened
2/10/2011	9:25:00 AM	Helium MFC set to  0.000000
2/10/2011	9:25:00 AM	H2 MFC set to  0.000000
2/10/2011	9:25:00 AM	BCl3 MFC set to  0.000000
2/10/2011	9:25:00 AM	PHl3 MFC set to  0.000000
2/10/2011	9:25:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:25:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:25:01 AM	Tube furnace set to 0
2/10/2011	9:26:01 AM	H2 valve closed
2/10/2011	9:26:01 AM	BCl3 valve closed
2/10/2011	9:26:01 AM	PH3 valve closed
2/10/2011	9:26:01 AM	SiCl4 pre valve closed
2/10/2011	9:26:01 AM	SiCl4 post valve closed
2/10/2011	9:26:01 AM	Bubbler valve closed
2/10/2011	9:26:01 AM	Helium valve opened
2/10/2011	9:26:01 AM	Main Vac valve opened
2/10/2011	9:26:01 AM	Bypass valve opened
2/10/2011	9:26:01 AM	Helium MFC set to  100.000000
2/10/2011	9:26:01 AM	H2 MFC set to  0.000000
2/10/2011	9:26:01 AM	BCl3 MFC set to  0.000000
2/10/2011	9:26:01 AM	PHl3 MFC set to  0.000000
2/10/2011	9:26:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:26:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:26:01 AM	Tube furnace set to 0
2/10/2011	9:27:01 AM	Helium valve closed
2/10/2011	9:27:01 AM	H2 valve closed
2/10/2011	9:27:01 AM	BCl3 valve closed
2/10/2011	9:27:01 AM	PH3 valve closed
2/10/2011	9:27:01 AM	SiCl4 pre valve closed
2/10/2011	9:27:01 AM	SiCl4 post valve closed
2/10/2011	9:27:01 AM	Bubbler valve closed
2/10/2011	9:27:01 AM	Main Vac valve opened
2/10/2011	9:27:01 AM	Bypass valve opened
2/10/2011	9:27:01 AM	Helium MFC set to  0.000000
2/10/2011	9:27:01 AM	H2 MFC set to  0.000000
2/10/2011	9:27:01 AM	BCl3 MFC set to  0.000000
2/10/2011	9:27:01 AM	PHl3 MFC set to  0.000000
2/10/2011	9:27:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:27:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:27:01 AM	Tube furnace set to 0
2/10/2011	9:28:01 AM	H2 valve closed
2/10/2011	9:28:01 AM	BCl3 valve closed
2/10/2011	9:28:01 AM	PH3 valve closed
2/10/2011	9:28:01 AM	SiCl4 pre valve closed
2/10/2011	9:28:01 AM	SiCl4 post valve closed
2/10/2011	9:28:01 AM	Bubbler valve closed
2/10/2011	9:28:01 AM	Helium valve opened
2/10/2011	9:28:01 AM	Main Vac valve opened
2/10/2011	9:28:01 AM	Bypass valve opened
2/10/2011	9:28:01 AM	Helium MFC set to  100.000000
2/10/2011	9:28:01 AM	H2 MFC set to  0.000000
2/10/2011	9:28:01 AM	BCl3 MFC set to  0.000000
2/10/2011	9:28:01 AM	PHl3 MFC set to  0.000000
2/10/2011	9:28:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:28:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:28:01 AM	Tube furnace set to 0
2/10/2011	9:29:01 AM	Helium valve closed
2/10/2011	9:29:01 AM	H2 valve closed
2/10/2011	9:29:01 AM	BCl3 valve closed
2/10/2011	9:29:01 AM	PH3 valve closed
2/10/2011	9:29:01 AM	SiCl4 pre valve closed
2/10/2011	9:29:01 AM	SiCl4 post valve closed
2/10/2011	9:29:01 AM	Bubbler valve closed
2/10/2011	9:29:01 AM	Main Vac valve opened
2/10/2011	9:29:01 AM	Bypass valve opened
2/10/2011	9:29:01 AM	Helium MFC set to  0.000000
2/10/2011	9:29:01 AM	H2 MFC set to  0.000000
2/10/2011	9:29:01 AM	BCl3 MFC set to  0.000000
2/10/2011	9:29:01 AM	PHl3 MFC set to  0.000000
2/10/2011	9:29:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:29:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:29:01 AM	Tube furnace set to 0
2/10/2011	9:30:01 AM	H2 valve closed
2/10/2011	9:30:01 AM	BCl3 valve closed
2/10/2011	9:30:01 AM	PH3 valve closed
2/10/2011	9:30:01 AM	SiCl4 pre valve closed
2/10/2011	9:30:01 AM	SiCl4 post valve closed
2/10/2011	9:30:01 AM	Bubbler valve closed
2/10/2011	9:30:01 AM	Helium valve opened
2/10/2011	9:30:01 AM	Main Vac valve opened
2/10/2011	9:30:01 AM	Bypass valve opened
2/10/2011	9:30:01 AM	Helium MFC set to  100.000000
2/10/2011	9:30:01 AM	H2 MFC set to  0.000000
2/10/2011	9:30:01 AM	BCl3 MFC set to  0.000000
2/10/2011	9:30:01 AM	PHl3 MFC set to  0.000000
2/10/2011	9:30:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:30:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:30:02 AM	Tube furnace set to 0
2/10/2011	9:31:02 AM	Helium valve closed
2/10/2011	9:31:02 AM	H2 valve closed
2/10/2011	9:31:02 AM	BCl3 valve closed
2/10/2011	9:31:02 AM	PH3 valve closed
2/10/2011	9:31:02 AM	SiCl4 pre valve closed
2/10/2011	9:31:02 AM	SiCl4 post valve closed
2/10/2011	9:31:02 AM	Bubbler valve closed
2/10/2011	9:31:02 AM	Main Vac valve opened
2/10/2011	9:31:02 AM	Bypass valve opened
2/10/2011	9:31:02 AM	Helium MFC set to  0.000000
2/10/2011	9:31:02 AM	H2 MFC set to  0.000000
2/10/2011	9:31:02 AM	BCl3 MFC set to  0.000000
2/10/2011	9:31:02 AM	PHl3 MFC set to  0.000000
2/10/2011	9:31:02 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:31:02 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:31:02 AM	Tube furnace set to 0
2/10/2011	9:32:02 AM	H2 valve closed
2/10/2011	9:32:02 AM	BCl3 valve closed
2/10/2011	9:32:02 AM	PH3 valve closed
2/10/2011	9:32:02 AM	SiCl4 pre valve closed
2/10/2011	9:32:02 AM	SiCl4 post valve closed
2/10/2011	9:32:02 AM	Bubbler valve closed
2/10/2011	9:32:02 AM	Helium valve opened
2/10/2011	9:32:02 AM	Main Vac valve opened
2/10/2011	9:32:02 AM	Bypass valve opened
2/10/2011	9:32:02 AM	Helium MFC set to  100.000000
2/10/2011	9:32:02 AM	H2 MFC set to  0.000000
2/10/2011	9:32:02 AM	BCl3 MFC set to  0.000000
2/10/2011	9:32:02 AM	PHl3 MFC set to  0.000000
2/10/2011	9:32:02 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:32:02 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:32:02 AM	Tube furnace set to 0
2/10/2011	9:33:02 AM	Helium valve closed
2/10/2011	9:33:02 AM	H2 valve closed
2/10/2011	9:33:02 AM	BCl3 valve closed
2/10/2011	9:33:02 AM	PH3 valve closed
2/10/2011	9:33:02 AM	SiCl4 pre valve closed
2/10/2011	9:33:02 AM	SiCl4 post valve closed
2/10/2011	9:33:02 AM	Bubbler valve closed
2/10/2011	9:33:02 AM	Main Vac valve opened
2/10/2011	9:33:02 AM	Bypass valve opened
2/10/2011	9:33:02 AM	Helium MFC set to  0.000000
2/10/2011	9:33:02 AM	H2 MFC set to  0.000000
2/10/2011	9:33:02 AM	BCl3 MFC set to  0.000000
2/10/2011	9:33:02 AM	PHl3 MFC set to  0.000000
2/10/2011	9:33:02 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:33:02 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:33:02 AM	Tube furnace set to 0
2/10/2011	9:34:02 AM	H2 valve closed
2/10/2011	9:34:02 AM	BCl3 valve closed
2/10/2011	9:34:02 AM	PH3 valve closed
2/10/2011	9:34:02 AM	SiCl4 pre valve closed
2/10/2011	9:34:02 AM	SiCl4 post valve closed
2/10/2011	9:34:02 AM	Bubbler valve closed
2/10/2011	9:34:02 AM	Helium valve opened
2/10/2011	9:34:02 AM	Main Vac valve opened
2/10/2011	9:34:02 AM	Bypass valve opened
2/10/2011	9:34:02 AM	Helium MFC set to  100.000000
2/10/2011	9:34:02 AM	H2 MFC set to  0.000000
2/10/2011	9:34:02 AM	BCl3 MFC set to  0.000000
2/10/2011	9:34:02 AM	PHl3 MFC set to  0.000000
2/10/2011	9:34:02 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:34:02 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:34:02 AM	Tube furnace set to 0
2/10/2011	9:35:02 AM	Helium valve closed
2/10/2011	9:35:02 AM	H2 valve closed
2/10/2011	9:35:02 AM	BCl3 valve closed
2/10/2011	9:35:02 AM	PH3 valve closed
2/10/2011	9:35:02 AM	SiCl4 pre valve closed
2/10/2011	9:35:02 AM	SiCl4 post valve closed
2/10/2011	9:35:02 AM	Bubbler valve closed
2/10/2011	9:35:02 AM	Main Vac valve opened
2/10/2011	9:35:02 AM	Bypass valve opened
2/10/2011	9:35:02 AM	Helium MFC set to  0.000000
2/10/2011	9:35:02 AM	H2 MFC set to  0.000000
2/10/2011	9:35:02 AM	BCl3 MFC set to  0.000000
2/10/2011	9:35:02 AM	PHl3 MFC set to  0.000000
2/10/2011	9:35:02 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:35:02 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:35:03 AM	Tube furnace set to 0
2/10/2011	9:36:03 AM	H2 valve closed
2/10/2011	9:36:03 AM	BCl3 valve closed
2/10/2011	9:36:03 AM	PH3 valve closed
2/10/2011	9:36:03 AM	SiCl4 pre valve closed
2/10/2011	9:36:03 AM	SiCl4 post valve closed
2/10/2011	9:36:03 AM	Bubbler valve closed
2/10/2011	9:36:03 AM	Helium valve opened
2/10/2011	9:36:03 AM	Main Vac valve opened
2/10/2011	9:36:03 AM	Bypass valve opened
2/10/2011	9:36:03 AM	Helium MFC set to  100.000000
2/10/2011	9:36:03 AM	H2 MFC set to  0.000000
2/10/2011	9:36:03 AM	BCl3 MFC set to  0.000000
2/10/2011	9:36:03 AM	PHl3 MFC set to  0.000000
2/10/2011	9:36:03 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:36:03 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:36:03 AM	Tube furnace set to 0
2/10/2011	9:37:03 AM	Helium valve closed
2/10/2011	9:37:03 AM	H2 valve closed
2/10/2011	9:37:03 AM	BCl3 valve closed
2/10/2011	9:37:03 AM	PH3 valve closed
2/10/2011	9:37:03 AM	SiCl4 pre valve closed
2/10/2011	9:37:03 AM	SiCl4 post valve closed
2/10/2011	9:37:03 AM	Bubbler valve closed
2/10/2011	9:37:03 AM	Main Vac valve opened
2/10/2011	9:37:03 AM	Bypass valve opened
2/10/2011	9:37:03 AM	Helium MFC set to  0.000000
2/10/2011	9:37:03 AM	H2 MFC set to  0.000000
2/10/2011	9:37:03 AM	BCl3 MFC set to  0.000000
2/10/2011	9:37:03 AM	PHl3 MFC set to  0.000000
2/10/2011	9:37:03 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:37:03 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:37:03 AM	Tube furnace set to 0
2/10/2011	9:37:04 AM	Run finished at 9:37 AM
2/10/2011	9:37:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/10/2011	9:39:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/10/2011	9:39:51 AM	Recipe started at 9:39 AM
2/10/2011	9:39:51 AM	Helium valve closed
2/10/2011	9:39:51 AM	H2 valve closed
2/10/2011	9:39:51 AM	BCl3 valve closed
2/10/2011	9:39:51 AM	PH3 valve closed
2/10/2011	9:39:51 AM	SiCl4 pre valve closed
2/10/2011	9:39:51 AM	SiCl4 post valve closed
2/10/2011	9:39:51 AM	Main Vac valve closed
2/10/2011	9:39:51 AM	Bypass valve closed
2/10/2011	9:39:51 AM	Bubbler valve closed
2/10/2011	9:39:51 AM	Helium MFC set to  0.000000
2/10/2011	9:39:51 AM	H2 MFC set to  0.000000
2/10/2011	9:39:51 AM	BCl3 MFC set to  0.000000
2/10/2011	9:39:51 AM	PHl3 MFC set to  0.000000
2/10/2011	9:39:51 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:39:51 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:39:51 AM	Tube furnace set to 0
2/10/2011	9:39:51 AM	Run finished at 9:39 AM
2/10/2011	9:39:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/10/2011	9:39:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2011	9:39:53 AM	Recipe started at 9:39 AM
2/10/2011	9:39:54 AM	H2 valve closed
2/10/2011	9:39:54 AM	BCl3 valve closed
2/10/2011	9:39:54 AM	PH3 valve closed
2/10/2011	9:39:54 AM	SiCl4 pre valve closed
2/10/2011	9:39:54 AM	SiCl4 post valve closed
2/10/2011	9:39:54 AM	Main Vac valve closed
2/10/2011	9:39:54 AM	Bypass valve closed
2/10/2011	9:39:54 AM	Bubbler valve closed
2/10/2011	9:39:54 AM	Helium valve opened
2/10/2011	9:39:54 AM	Helium MFC set to  500.000000
2/10/2011	9:39:54 AM	H2 MFC set to  0.000000
2/10/2011	9:39:54 AM	BCl3 MFC set to  0.000000
2/10/2011	9:39:54 AM	PHl3 MFC set to  0.000000
2/10/2011	9:39:54 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:39:54 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:39:54 AM	Tube furnace set to 0
2/10/2011	9:41:14 AM	Helium valve closed
2/10/2011	9:41:14 AM	H2 valve closed
2/10/2011	9:41:14 AM	BCl3 valve closed
2/10/2011	9:41:14 AM	PH3 valve closed
2/10/2011	9:41:14 AM	SiCl4 pre valve closed
2/10/2011	9:41:14 AM	SiCl4 post valve closed
2/10/2011	9:41:14 AM	Main Vac valve closed
2/10/2011	9:41:14 AM	Bypass valve closed
2/10/2011	9:41:14 AM	Bubbler valve closed
2/10/2011	9:41:14 AM	Helium MFC set to  0.000000
2/10/2011	9:41:14 AM	H2 MFC set to  0.000000
2/10/2011	9:41:14 AM	BCl3 MFC set to  0.000000
2/10/2011	9:41:14 AM	PHl3 MFC set to  0.000000
2/10/2011	9:41:14 AM	SiCl4 MFC set to  0.000000
2/10/2011	9:41:14 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	9:41:14 AM	Tube furnace set to 0
2/10/2011	9:41:15 AM	Run finished at 9:41 AM
2/10/2011	9:41:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/10/2011	10:02:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2011	10:02:54 AM	Recipe started at 10:02 AM
2/10/2011	10:02:54 AM	Helium valve closed
2/10/2011	10:02:54 AM	H2 valve closed
2/10/2011	10:02:54 AM	BCl3 valve closed
2/10/2011	10:02:54 AM	PH3 valve closed
2/10/2011	10:02:54 AM	SiCl4 pre valve closed
2/10/2011	10:02:54 AM	SiCl4 post valve closed
2/10/2011	10:02:54 AM	Main Vac valve closed
2/10/2011	10:02:54 AM	Bubbler valve closed
2/10/2011	10:02:54 AM	Bypass valve opened
2/10/2011	10:02:54 AM	Helium MFC set to  0.000000
2/10/2011	10:02:54 AM	H2 MFC set to  0.000000
2/10/2011	10:02:54 AM	BCl3 MFC set to  0.000000
2/10/2011	10:02:54 AM	PHl3 MFC set to  0.000000
2/10/2011	10:02:54 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:02:54 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:02:54 AM	Tube furnace set to 0
2/10/2011	10:03:17 AM	Helium valve closed
2/10/2011	10:03:17 AM	H2 valve closed
2/10/2011	10:03:17 AM	BCl3 valve closed
2/10/2011	10:03:17 AM	PH3 valve closed
2/10/2011	10:03:17 AM	SiCl4 pre valve closed
2/10/2011	10:03:17 AM	SiCl4 post valve closed
2/10/2011	10:03:17 AM	Bubbler valve closed
2/10/2011	10:03:17 AM	Main Vac valve opened
2/10/2011	10:03:17 AM	Bypass valve opened
2/10/2011	10:03:17 AM	Helium MFC set to  0.000000
2/10/2011	10:03:17 AM	H2 MFC set to  0.000000
2/10/2011	10:03:17 AM	BCl3 MFC set to  0.000000
2/10/2011	10:03:17 AM	PHl3 MFC set to  0.000000
2/10/2011	10:03:17 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:03:17 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:03:17 AM	Tube furnace set to 0
2/10/2011	10:03:18 AM	Run finished at 10:03 AM
2/10/2011	10:03:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/10/2011	10:04:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/10/2011	10:04:56 AM	Recipe started at 10:04 AM
2/10/2011	10:04:56 AM	Helium valve closed
2/10/2011	10:04:56 AM	H2 valve closed
2/10/2011	10:04:56 AM	BCl3 valve closed
2/10/2011	10:04:56 AM	PH3 valve closed
2/10/2011	10:04:56 AM	SiCl4 pre valve closed
2/10/2011	10:04:56 AM	SiCl4 post valve closed
2/10/2011	10:04:56 AM	Main Vac valve closed
2/10/2011	10:04:56 AM	Bubbler valve closed
2/10/2011	10:04:56 AM	Bypass valve opened
2/10/2011	10:04:56 AM	Helium MFC set to  0.000000
2/10/2011	10:04:56 AM	H2 MFC set to  0.000000
2/10/2011	10:04:56 AM	BCl3 MFC set to  0.000000
2/10/2011	10:04:56 AM	PHl3 MFC set to  0.000000
2/10/2011	10:04:56 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:04:56 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:04:56 AM	Tube furnace set to 0
2/10/2011	10:04:56 AM	Helium valve closed
2/10/2011	10:04:56 AM	H2 valve closed
2/10/2011	10:04:56 AM	BCl3 valve closed
2/10/2011	10:04:56 AM	PH3 valve closed
2/10/2011	10:04:56 AM	SiCl4 pre valve closed
2/10/2011	10:04:56 AM	SiCl4 post valve closed
2/10/2011	10:04:56 AM	Bubbler valve closed
2/10/2011	10:04:57 AM	Main Vac valve opened
2/10/2011	10:04:57 AM	Bypass valve opened
2/10/2011	10:04:57 AM	Helium MFC set to  0.000000
2/10/2011	10:04:57 AM	H2 MFC set to  0.000000
2/10/2011	10:04:57 AM	BCl3 MFC set to  0.000000
2/10/2011	10:04:57 AM	PHl3 MFC set to  0.000000
2/10/2011	10:04:57 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:04:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:04:57 AM	Tube furnace set to 0
2/10/2011	10:05:57 AM	H2 valve closed
2/10/2011	10:05:57 AM	BCl3 valve closed
2/10/2011	10:05:57 AM	PH3 valve closed
2/10/2011	10:05:57 AM	SiCl4 pre valve closed
2/10/2011	10:05:57 AM	SiCl4 post valve closed
2/10/2011	10:05:57 AM	Bubbler valve closed
2/10/2011	10:05:57 AM	Helium valve opened
2/10/2011	10:05:57 AM	Main Vac valve opened
2/10/2011	10:05:57 AM	Bypass valve opened
2/10/2011	10:05:57 AM	Helium MFC set to  100.000000
2/10/2011	10:05:57 AM	H2 MFC set to  0.000000
2/10/2011	10:05:57 AM	BCl3 MFC set to  0.000000
2/10/2011	10:05:57 AM	PHl3 MFC set to  0.000000
2/10/2011	10:05:57 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:05:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:05:57 AM	Tube furnace set to 0
2/10/2011	10:06:57 AM	Helium valve closed
2/10/2011	10:06:57 AM	H2 valve closed
2/10/2011	10:06:57 AM	BCl3 valve closed
2/10/2011	10:06:57 AM	PH3 valve closed
2/10/2011	10:06:57 AM	SiCl4 pre valve closed
2/10/2011	10:06:57 AM	SiCl4 post valve closed
2/10/2011	10:06:57 AM	Bubbler valve closed
2/10/2011	10:06:57 AM	Main Vac valve opened
2/10/2011	10:06:57 AM	Bypass valve opened
2/10/2011	10:06:57 AM	Helium MFC set to  0.000000
2/10/2011	10:06:57 AM	H2 MFC set to  0.000000
2/10/2011	10:06:57 AM	BCl3 MFC set to  0.000000
2/10/2011	10:06:57 AM	PHl3 MFC set to  0.000000
2/10/2011	10:06:57 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:06:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:06:57 AM	Tube furnace set to 0
2/10/2011	10:07:57 AM	H2 valve closed
2/10/2011	10:07:57 AM	BCl3 valve closed
2/10/2011	10:07:57 AM	PH3 valve closed
2/10/2011	10:07:57 AM	SiCl4 pre valve closed
2/10/2011	10:07:57 AM	SiCl4 post valve closed
2/10/2011	10:07:57 AM	Bubbler valve closed
2/10/2011	10:07:57 AM	Helium valve opened
2/10/2011	10:07:57 AM	Main Vac valve opened
2/10/2011	10:07:57 AM	Bypass valve opened
2/10/2011	10:07:57 AM	Helium MFC set to  100.000000
2/10/2011	10:07:57 AM	H2 MFC set to  0.000000
2/10/2011	10:07:57 AM	BCl3 MFC set to  0.000000
2/10/2011	10:07:57 AM	PHl3 MFC set to  0.000000
2/10/2011	10:07:57 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:07:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:07:57 AM	Tube furnace set to 0
2/10/2011	10:08:57 AM	Helium valve closed
2/10/2011	10:08:57 AM	H2 valve closed
2/10/2011	10:08:57 AM	BCl3 valve closed
2/10/2011	10:08:57 AM	PH3 valve closed
2/10/2011	10:08:57 AM	SiCl4 pre valve closed
2/10/2011	10:08:57 AM	SiCl4 post valve closed
2/10/2011	10:08:57 AM	Bubbler valve closed
2/10/2011	10:08:57 AM	Main Vac valve opened
2/10/2011	10:08:57 AM	Bypass valve opened
2/10/2011	10:08:57 AM	Helium MFC set to  0.000000
2/10/2011	10:08:57 AM	H2 MFC set to  0.000000
2/10/2011	10:08:57 AM	BCl3 MFC set to  0.000000
2/10/2011	10:08:57 AM	PHl3 MFC set to  0.000000
2/10/2011	10:08:57 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:08:57 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:08:57 AM	Tube furnace set to 0
2/10/2011	10:09:57 AM	H2 valve closed
2/10/2011	10:09:57 AM	BCl3 valve closed
2/10/2011	10:09:57 AM	PH3 valve closed
2/10/2011	10:09:57 AM	SiCl4 pre valve closed
2/10/2011	10:09:57 AM	SiCl4 post valve closed
2/10/2011	10:09:57 AM	Bubbler valve closed
2/10/2011	10:09:57 AM	Helium valve opened
2/10/2011	10:09:58 AM	Main Vac valve opened
2/10/2011	10:09:58 AM	Bypass valve opened
2/10/2011	10:09:58 AM	Helium MFC set to  100.000000
2/10/2011	10:09:58 AM	H2 MFC set to  0.000000
2/10/2011	10:09:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:09:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:09:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:09:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:09:58 AM	Tube furnace set to 0
2/10/2011	10:10:58 AM	Helium valve closed
2/10/2011	10:10:58 AM	H2 valve closed
2/10/2011	10:10:58 AM	BCl3 valve closed
2/10/2011	10:10:58 AM	PH3 valve closed
2/10/2011	10:10:58 AM	SiCl4 pre valve closed
2/10/2011	10:10:58 AM	SiCl4 post valve closed
2/10/2011	10:10:58 AM	Bubbler valve closed
2/10/2011	10:10:58 AM	Main Vac valve opened
2/10/2011	10:10:58 AM	Bypass valve opened
2/10/2011	10:10:58 AM	Helium MFC set to  0.000000
2/10/2011	10:10:58 AM	H2 MFC set to  0.000000
2/10/2011	10:10:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:10:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:10:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:10:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:10:58 AM	Tube furnace set to 0
2/10/2011	10:11:58 AM	H2 valve closed
2/10/2011	10:11:58 AM	BCl3 valve closed
2/10/2011	10:11:58 AM	PH3 valve closed
2/10/2011	10:11:58 AM	SiCl4 pre valve closed
2/10/2011	10:11:58 AM	SiCl4 post valve closed
2/10/2011	10:11:58 AM	Bubbler valve closed
2/10/2011	10:11:58 AM	Helium valve opened
2/10/2011	10:11:58 AM	Main Vac valve opened
2/10/2011	10:11:58 AM	Bypass valve opened
2/10/2011	10:11:58 AM	Helium MFC set to  100.000000
2/10/2011	10:11:58 AM	H2 MFC set to  0.000000
2/10/2011	10:11:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:11:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:11:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:11:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:11:58 AM	Tube furnace set to 0
2/10/2011	10:12:58 AM	Helium valve closed
2/10/2011	10:12:58 AM	H2 valve closed
2/10/2011	10:12:58 AM	BCl3 valve closed
2/10/2011	10:12:58 AM	PH3 valve closed
2/10/2011	10:12:58 AM	SiCl4 pre valve closed
2/10/2011	10:12:58 AM	SiCl4 post valve closed
2/10/2011	10:12:58 AM	Bubbler valve closed
2/10/2011	10:12:58 AM	Main Vac valve opened
2/10/2011	10:12:58 AM	Bypass valve opened
2/10/2011	10:12:58 AM	Helium MFC set to  0.000000
2/10/2011	10:12:58 AM	H2 MFC set to  0.000000
2/10/2011	10:12:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:12:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:12:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:12:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:12:58 AM	Tube furnace set to 0
2/10/2011	10:13:58 AM	H2 valve closed
2/10/2011	10:13:58 AM	BCl3 valve closed
2/10/2011	10:13:58 AM	PH3 valve closed
2/10/2011	10:13:58 AM	SiCl4 pre valve closed
2/10/2011	10:13:58 AM	SiCl4 post valve closed
2/10/2011	10:13:58 AM	Bubbler valve closed
2/10/2011	10:13:58 AM	Helium valve opened
2/10/2011	10:13:58 AM	Main Vac valve opened
2/10/2011	10:13:58 AM	Bypass valve opened
2/10/2011	10:13:58 AM	Helium MFC set to  100.000000
2/10/2011	10:13:58 AM	H2 MFC set to  0.000000
2/10/2011	10:13:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:13:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:13:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:13:58 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:13:58 AM	Tube furnace set to 0
2/10/2011	10:14:58 AM	Helium valve closed
2/10/2011	10:14:58 AM	H2 valve closed
2/10/2011	10:14:58 AM	BCl3 valve closed
2/10/2011	10:14:58 AM	PH3 valve closed
2/10/2011	10:14:58 AM	SiCl4 pre valve closed
2/10/2011	10:14:58 AM	SiCl4 post valve closed
2/10/2011	10:14:58 AM	Bubbler valve closed
2/10/2011	10:14:58 AM	Main Vac valve opened
2/10/2011	10:14:58 AM	Bypass valve opened
2/10/2011	10:14:58 AM	Helium MFC set to  0.000000
2/10/2011	10:14:58 AM	H2 MFC set to  0.000000
2/10/2011	10:14:58 AM	BCl3 MFC set to  0.000000
2/10/2011	10:14:58 AM	PHl3 MFC set to  0.000000
2/10/2011	10:14:58 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:14:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:14:59 AM	Tube furnace set to 0
2/10/2011	10:15:59 AM	H2 valve closed
2/10/2011	10:15:59 AM	BCl3 valve closed
2/10/2011	10:15:59 AM	PH3 valve closed
2/10/2011	10:15:59 AM	SiCl4 pre valve closed
2/10/2011	10:15:59 AM	SiCl4 post valve closed
2/10/2011	10:15:59 AM	Bubbler valve closed
2/10/2011	10:15:59 AM	Helium valve opened
2/10/2011	10:15:59 AM	Main Vac valve opened
2/10/2011	10:15:59 AM	Bypass valve opened
2/10/2011	10:15:59 AM	Helium MFC set to  100.000000
2/10/2011	10:15:59 AM	H2 MFC set to  0.000000
2/10/2011	10:15:59 AM	BCl3 MFC set to  0.000000
2/10/2011	10:15:59 AM	PHl3 MFC set to  0.000000
2/10/2011	10:15:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:15:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:15:59 AM	Tube furnace set to 0
2/10/2011	10:16:59 AM	Helium valve closed
2/10/2011	10:16:59 AM	H2 valve closed
2/10/2011	10:16:59 AM	BCl3 valve closed
2/10/2011	10:16:59 AM	PH3 valve closed
2/10/2011	10:16:59 AM	SiCl4 pre valve closed
2/10/2011	10:16:59 AM	SiCl4 post valve closed
2/10/2011	10:16:59 AM	Bubbler valve closed
2/10/2011	10:16:59 AM	Main Vac valve opened
2/10/2011	10:16:59 AM	Bypass valve opened
2/10/2011	10:16:59 AM	Helium MFC set to  0.000000
2/10/2011	10:16:59 AM	H2 MFC set to  0.000000
2/10/2011	10:16:59 AM	BCl3 MFC set to  0.000000
2/10/2011	10:16:59 AM	PHl3 MFC set to  0.000000
2/10/2011	10:16:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:16:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:16:59 AM	Tube furnace set to 0
2/10/2011	10:17:59 AM	H2 valve closed
2/10/2011	10:17:59 AM	BCl3 valve closed
2/10/2011	10:17:59 AM	PH3 valve closed
2/10/2011	10:17:59 AM	SiCl4 pre valve closed
2/10/2011	10:17:59 AM	SiCl4 post valve closed
2/10/2011	10:17:59 AM	Bubbler valve closed
2/10/2011	10:17:59 AM	Helium valve opened
2/10/2011	10:17:59 AM	Main Vac valve opened
2/10/2011	10:17:59 AM	Bypass valve opened
2/10/2011	10:17:59 AM	Helium MFC set to  100.000000
2/10/2011	10:17:59 AM	H2 MFC set to  0.000000
2/10/2011	10:17:59 AM	BCl3 MFC set to  0.000000
2/10/2011	10:17:59 AM	PHl3 MFC set to  0.000000
2/10/2011	10:17:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:17:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:17:59 AM	Tube furnace set to 0
2/10/2011	10:18:59 AM	Helium valve closed
2/10/2011	10:18:59 AM	H2 valve closed
2/10/2011	10:18:59 AM	BCl3 valve closed
2/10/2011	10:18:59 AM	PH3 valve closed
2/10/2011	10:18:59 AM	SiCl4 pre valve closed
2/10/2011	10:18:59 AM	SiCl4 post valve closed
2/10/2011	10:18:59 AM	Bubbler valve closed
2/10/2011	10:18:59 AM	Main Vac valve opened
2/10/2011	10:18:59 AM	Bypass valve opened
2/10/2011	10:18:59 AM	Helium MFC set to  0.000000
2/10/2011	10:18:59 AM	H2 MFC set to  0.000000
2/10/2011	10:18:59 AM	BCl3 MFC set to  0.000000
2/10/2011	10:18:59 AM	PHl3 MFC set to  0.000000
2/10/2011	10:18:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:18:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:18:59 AM	Tube furnace set to 0
2/10/2011	10:19:59 AM	H2 valve closed
2/10/2011	10:19:59 AM	BCl3 valve closed
2/10/2011	10:19:59 AM	PH3 valve closed
2/10/2011	10:19:59 AM	SiCl4 pre valve closed
2/10/2011	10:19:59 AM	SiCl4 post valve closed
2/10/2011	10:19:59 AM	Bubbler valve closed
2/10/2011	10:19:59 AM	Helium valve opened
2/10/2011	10:19:59 AM	Main Vac valve opened
2/10/2011	10:19:59 AM	Bypass valve opened
2/10/2011	10:19:59 AM	Helium MFC set to  100.000000
2/10/2011	10:19:59 AM	H2 MFC set to  0.000000
2/10/2011	10:19:59 AM	BCl3 MFC set to  0.000000
2/10/2011	10:19:59 AM	PHl3 MFC set to  0.000000
2/10/2011	10:19:59 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:19:59 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:20:00 AM	Tube furnace set to 0
2/10/2011	10:21:00 AM	Helium valve closed
2/10/2011	10:21:00 AM	H2 valve closed
2/10/2011	10:21:00 AM	BCl3 valve closed
2/10/2011	10:21:00 AM	PH3 valve closed
2/10/2011	10:21:00 AM	SiCl4 pre valve closed
2/10/2011	10:21:00 AM	SiCl4 post valve closed
2/10/2011	10:21:00 AM	Bubbler valve closed
2/10/2011	10:21:00 AM	Main Vac valve opened
2/10/2011	10:21:00 AM	Bypass valve opened
2/10/2011	10:21:00 AM	Helium MFC set to  0.000000
2/10/2011	10:21:00 AM	H2 MFC set to  0.000000
2/10/2011	10:21:00 AM	BCl3 MFC set to  0.000000
2/10/2011	10:21:00 AM	PHl3 MFC set to  0.000000
2/10/2011	10:21:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:21:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:21:00 AM	Tube furnace set to 0
2/10/2011	10:22:00 AM	H2 valve closed
2/10/2011	10:22:00 AM	BCl3 valve closed
2/10/2011	10:22:00 AM	PH3 valve closed
2/10/2011	10:22:00 AM	SiCl4 pre valve closed
2/10/2011	10:22:00 AM	SiCl4 post valve closed
2/10/2011	10:22:00 AM	Bubbler valve closed
2/10/2011	10:22:00 AM	Helium valve opened
2/10/2011	10:22:00 AM	Main Vac valve opened
2/10/2011	10:22:00 AM	Bypass valve opened
2/10/2011	10:22:00 AM	Helium MFC set to  100.000000
2/10/2011	10:22:00 AM	H2 MFC set to  0.000000
2/10/2011	10:22:00 AM	BCl3 MFC set to  0.000000
2/10/2011	10:22:00 AM	PHl3 MFC set to  0.000000
2/10/2011	10:22:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:22:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:22:00 AM	Tube furnace set to 0
2/10/2011	10:23:00 AM	Helium valve closed
2/10/2011	10:23:00 AM	H2 valve closed
2/10/2011	10:23:00 AM	BCl3 valve closed
2/10/2011	10:23:00 AM	PH3 valve closed
2/10/2011	10:23:00 AM	SiCl4 pre valve closed
2/10/2011	10:23:00 AM	SiCl4 post valve closed
2/10/2011	10:23:00 AM	Bubbler valve closed
2/10/2011	10:23:00 AM	Main Vac valve opened
2/10/2011	10:23:00 AM	Bypass valve opened
2/10/2011	10:23:00 AM	Helium MFC set to  0.000000
2/10/2011	10:23:00 AM	H2 MFC set to  0.000000
2/10/2011	10:23:00 AM	BCl3 MFC set to  0.000000
2/10/2011	10:23:00 AM	PHl3 MFC set to  0.000000
2/10/2011	10:23:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:23:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:23:00 AM	Tube furnace set to 0
2/10/2011	10:24:00 AM	H2 valve closed
2/10/2011	10:24:00 AM	BCl3 valve closed
2/10/2011	10:24:00 AM	PH3 valve closed
2/10/2011	10:24:00 AM	SiCl4 pre valve closed
2/10/2011	10:24:00 AM	SiCl4 post valve closed
2/10/2011	10:24:00 AM	Bubbler valve closed
2/10/2011	10:24:00 AM	Helium valve opened
2/10/2011	10:24:00 AM	Main Vac valve opened
2/10/2011	10:24:00 AM	Bypass valve opened
2/10/2011	10:24:00 AM	Helium MFC set to  100.000000
2/10/2011	10:24:00 AM	H2 MFC set to  0.000000
2/10/2011	10:24:00 AM	BCl3 MFC set to  0.000000
2/10/2011	10:24:00 AM	PHl3 MFC set to  0.000000
2/10/2011	10:24:00 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:24:00 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:24:01 AM	Tube furnace set to 0
2/10/2011	10:25:01 AM	Helium valve closed
2/10/2011	10:25:01 AM	H2 valve closed
2/10/2011	10:25:01 AM	BCl3 valve closed
2/10/2011	10:25:01 AM	PH3 valve closed
2/10/2011	10:25:01 AM	SiCl4 pre valve closed
2/10/2011	10:25:01 AM	SiCl4 post valve closed
2/10/2011	10:25:01 AM	Bubbler valve closed
2/10/2011	10:25:01 AM	Main Vac valve opened
2/10/2011	10:25:01 AM	Bypass valve opened
2/10/2011	10:25:01 AM	Helium MFC set to  0.000000
2/10/2011	10:25:01 AM	H2 MFC set to  0.000000
2/10/2011	10:25:01 AM	BCl3 MFC set to  0.000000
2/10/2011	10:25:01 AM	PHl3 MFC set to  0.000000
2/10/2011	10:25:01 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:25:01 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:25:01 AM	Tube furnace set to 0
2/10/2011	10:25:02 AM	Run finished at 10:25 AM
2/10/2011	10:25:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/10/2011	10:34:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/10/2011	10:34:14 AM	Recipe started at 10:34 AM
2/10/2011	10:34:14 AM	Helium valve closed
2/10/2011	10:34:14 AM	H2 valve closed
2/10/2011	10:34:14 AM	BCl3 valve closed
2/10/2011	10:34:14 AM	PH3 valve closed
2/10/2011	10:34:14 AM	SiCl4 pre valve closed
2/10/2011	10:34:14 AM	SiCl4 post valve closed
2/10/2011	10:34:14 AM	Main Vac valve closed
2/10/2011	10:34:14 AM	Bypass valve closed
2/10/2011	10:34:14 AM	Bubbler valve closed
2/10/2011	10:34:14 AM	Helium MFC set to  0.000000
2/10/2011	10:34:14 AM	H2 MFC set to  0.000000
2/10/2011	10:34:14 AM	BCl3 MFC set to  0.000000
2/10/2011	10:34:14 AM	PHl3 MFC set to  0.000000
2/10/2011	10:34:14 AM	SiCl4 MFC set to  0.000000
2/10/2011	10:34:14 AM	Bypass solenoid MFC set to  0.000000
2/10/2011	10:34:14 AM	Tube furnace set to 0
2/10/2011	10:34:14 AM	Run finished at 10:34 AM
2/10/2011	10:34:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
